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Evaluation of the junction delineation accuracy and reproducibility with the SSRM technique

dc.contributor.authorEyben, Pierre
dc.contributor.authorVanhaeren, Danielle
dc.contributor.authorJanssens, Tom
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorAdachi, Kanna
dc.contributor.authorIshimaru, Kazunari
dc.date.accessioned2021-10-16T16:04:41Z
dc.date.available2021-10-16T16:04:41Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12142
dc.sourceIIOimport
dc.titleEvaluation of the junction delineation accuracy and reproducibility with the SSRM technique
dc.typeJournal article
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVanhaeren, Danielle
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecVanhaeren, Danielle::0000-0001-8624-9533
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.beginpage437
dc.source.endpage440
dc.source.journalMicroelectronic Engineering
dc.source.issue3
dc.source.volume84
imec.availabilityPublished - imec


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