Junction photovoltage (JPV) techniques for ultra-shallow junction characterization

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Authors
Faifer, V.N.; Current, M.I.; Schroder, D.K.; Clarysse, Trudo; Vandervorst, Wilfried
Conference
Analytical and Diagnostic Techniques for Semiconductor Materials, devices and Processes 7
Title
Junction photovoltage (JPV) techniques for ultra-shallow junction characterization
Publication type
Proceedings paper
Embargo date
9999-12-31
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