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Impact of temperature and position dependent residual stress in porous silicon on the final pore shape after high temperature annealing

dc.contributor.authorGhannam, Moustafa
dc.contributor.authorHassan, Mostafa Medhat
dc.contributor.authorDepauw, Valerie
dc.contributor.authorBeaucarne, Guy
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-16T16:14:54Z
dc.date.available2021-10-16T16:14:54Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12189
dc.sourceIIOimport
dc.titleImpact of temperature and position dependent residual stress in porous silicon on the final pore shape after high temperature annealing
dc.typeProceedings paper
dc.contributor.imecauthorGhannam, Moustafa
dc.contributor.imecauthorDepauw, Valerie
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecDepauw, Valerie::0000-0003-2045-9698
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewno
dc.source.beginpage2015
dc.source.endpage2018
dc.source.conference22nd European Photovoltaic Solar Energy Conference and Exhibition
dc.source.conferencedate3/09/2007
dc.source.conferencelocationMilano Italy
imec.availabilityPublished - imec


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