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Depth resolution optimization and role of multiple scattering in low-energy TOF-ERDA

dc.contributor.authorGiangrandi, Simone
dc.contributor.authorBrijs, Bert
dc.contributor.authorArstila, Kai
dc.contributor.authorSajavaara, T.
dc.contributor.authorVantomme, Andre
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T16:16:15Z
dc.date.available2021-10-16T16:16:15Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12195
dc.sourceIIOimport
dc.titleDepth resolution optimization and role of multiple scattering in low-energy TOF-ERDA
dc.typeOral presentation
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceInternational Workshop on High-Resolution Depth Profiling
dc.source.conferencedate17/06/2007
dc.source.conferencelocationRadebeul Germany
imec.availabilityPublished - open access


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