Authors

Finders, Jo; Bruggeman, B.; Ronse, Kurt; Van den hove, Luc; Tzviatkov, Plamen; Dusa, M.

Conference

Proceedings of the Microlithography Seminar INTERFACE

Title

Optimisation methodology towards a manufacturable 0.3 μm poly-gate process using i-line lithography

Publication type

Proceedings paper

Embargo date

9999-12-31