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Pattern-dependent heating of 3D structures

dc.contributor.authorGranneman, Ernst
dc.contributor.authorPages, Xavier
dc.contributor.authorTerhorst, Huub
dc.contributor.authorVerheyden, Kurt
dc.contributor.authorVanormelingen, Koen
dc.contributor.authorRosseel, Erik
dc.date.accessioned2021-10-16T16:22:29Z
dc.date.available2021-10-16T16:22:29Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12222
dc.sourceIIOimport
dc.titlePattern-dependent heating of 3D structures
dc.typeProceedings paper
dc.contributor.imecauthorRosseel, Erik
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage131
dc.source.endpage138
dc.source.conference15th IEEE Conference on Advanced Thermal Processing of Semiconductors - RTP
dc.source.conferencedate2/10/2007
dc.source.conferencelocationCatania Italy
imec.availabilityPublished - open access


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