Show simple item record

World-wide standardization effort on leaching measurement methodology

dc.contributor.authorGronheid, Roel
dc.contributor.authorBaerts, Christina
dc.contributor.authorCaporalo, Stefan
dc.contributor.authorAlexander, Jim
dc.contributor.authorRathsack, Ben
dc.contributor.authorScheer, Steven
dc.contributor.authorOhmori, Katsumi
dc.contributor.authorRice, Bryan
dc.date.accessioned2021-10-16T16:24:33Z
dc.date.available2021-10-16T16:24:33Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12231
dc.sourceIIOimport
dc.titleWorld-wide standardization effort on leaching measurement methodology
dc.typeProceedings paper
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorBaerts, Christina
dc.contributor.imecauthorScheer, Steven
dc.source.peerreviewno
dc.source.conference4th International Symposium on Immersion Lithography
dc.source.conferencedate8/10/2007
dc.source.conferencelocationKeystone, CO USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record