Fabrication of porous membranes for MEMS packaging by one-step anodization in sulfuric acid

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Authors

Hellin Rico, Raquel; Du Bois, Bert; Witvrouw, Ann; Van Hoof, Chris; Celis, Jean-Pierre

Issue

9

Journal

Journal of the Electrochemical Society

Volume

154

Title

Fabrication of porous membranes for MEMS packaging by one-step anodization in sulfuric acid

Publication type

Journal article

Embargo date

9999-12-31

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