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Fabrication of porous membranes for MEMS packaging by one-step anodization in sulfuric acid

dc.contributor.authorHellin Rico, Raquel
dc.contributor.authorDu Bois, Bert
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorCelis, Jean-Pierre
dc.date.accessioned2021-10-16T16:33:13Z
dc.date.available2021-10-16T16:33:13Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12266
dc.sourceIIOimport
dc.titleFabrication of porous membranes for MEMS packaging by one-step anodization in sulfuric acid
dc.typeJournal article
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageK74
dc.source.endpageK78
dc.source.journalJournal of the Electrochemical Society
dc.source.issue9
dc.source.volume154
imec.availabilityPublished - open access


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