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Screening of second-generation high-index liquids

dc.contributor.authorHendrickx, Eric
dc.contributor.authorPostnikov, Sergey
dc.contributor.authorFoubert, Philippe
dc.contributor.authorGronheid, Roel
dc.contributor.authorKim, Byeong Soo
dc.date.accessioned2021-10-16T16:34:08Z
dc.date.available2021-10-16T16:34:08Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12270
dc.sourceIIOimport
dc.titleScreening of second-generation high-index liquids
dc.typeProceedings paper
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorFoubert, Philippe
dc.contributor.imecauthorGronheid, Roel
dc.source.peerreviewno
dc.source.beginpage65190A
dc.source.conferenceAdvances in Resist Materials and Processing Technology XXIV
dc.source.conferencedate25/02/2007
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec
imec.internalnotesSPIE Proc.; Vol. 6519


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