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Impact of direct CMP on surface and bulk properties of high porosity low-k materials

dc.contributor.authorHeylen, Nancy
dc.contributor.authorSinapi, Fabrice
dc.contributor.authorTravaly, Youssef
dc.contributor.authorVereecke, Guy
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorCarbonell, Laure
dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorHellin, David
dc.contributor.authorHernandez, Jose Luis
dc.date.accessioned2021-10-16T16:39:06Z
dc.date.available2021-10-16T16:39:06Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12292
dc.sourceIIOimport
dc.titleImpact of direct CMP on surface and bulk properties of high porosity low-k materials
dc.typeProceedings paper
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHellin, David
dc.contributor.imecauthorHernandez, Jose Luis
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage549
dc.source.endpage563
dc.source.conferenceAdvanced Metallization Conference 2006
dc.source.conferencedate17/10/2006
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access
imec.internalnotesWas also presented at 16th ADMETA in Tokyo


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