Authors

Hoffmann, Thomas Y.; Noda, Taiji; Felch, S.; Severi, Simone; Parihar, V.; Forstner, H.; Vrancken, Christa; de Potter de ten Broeck, Muriel; Van Daele, Benny; Bender, Hugo; Niwa, Masaaki; Schreutelkamp, Rob; Vandervorst, Wilfried; Biesemans, Serge; Absil, Philippe

Conference

Extended Abstracts of the 7th International Workshop on Junction Technology

Title

Laser annealed junctions: process integration sequence optimization for advanced CMOS technologies

Publication type

Proceedings paper

Embargo date

9999-12-31