Publication:

Laser annealed junctions: process integration sequence optimization for advanced CMOS technologies

Date

2007
Proceedings Paper
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Author(s)

Hoffmann, Thomas Y.
;
Noda, Taiji
;
Felch, S.
;
Severi, Simone  
;
Parihar, V.
;
Forstner, H.
;
Vrancken, Christa  
;
de Potter de ten Broeck, Muriel  
;
Van Daele, Benny
;
Bender, Hugo  
;
Niwa, Masaaki
;
Schreutelkamp, Rob
;
Vandervorst, Wilfried  
;
Biesemans, Serge  
;
Absil, Philippe  

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