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Investigation of intrinsic stress effects in cantilever structures

dc.contributor.authorHollauer, Christian
dc.contributor.authorCeric, Hajdn
dc.contributor.authorVan Barel, Greg
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorSelberherr, S.
dc.date.accessioned2021-10-16T16:41:55Z
dc.date.available2021-10-16T16:41:55Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12303
dc.sourceIIOimport
dc.titleInvestigation of intrinsic stress effects in cantilever structures
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage151
dc.source.endpage154
dc.source.conferenceProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - NEMS
dc.source.conferencedate16/01/2007
dc.source.conferencelocationBangkok Thailand
imec.availabilityPublished - open access


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