A DLTS study on plasma-hydrogenated n-type high-resistivity MCz silicon

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Authors

Huang, J.L.; Simoen, Eddy; Claeys, Cor; Rafi, J.M.; Clauws, P.

Issue

7

Journal

Journal of Materials Science: Materials in Electronics

Volume

18

Title

A DLTS study on plasma-hydrogenated n-type high-resistivity MCz silicon

Publication type

Journal article

Embargo date

9999-12-31

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