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A DLTS study on plasma-hydrogenated n-type high-resistivity MCz silicon

dc.contributor.authorHuang, J.L.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorRafi, J.M.
dc.contributor.authorClauws, P.
dc.date.accessioned2021-10-16T16:46:01Z
dc.date.available2021-10-16T16:46:01Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12319
dc.sourceIIOimport
dc.titleA DLTS study on plasma-hydrogenated n-type high-resistivity MCz silicon
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage705
dc.source.endpage710
dc.source.journalJournal of Materials Science: Materials in Electronics
dc.source.issue7
dc.source.volume18
imec.availabilityPublished - open access


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