Fabrication of CMOS compatible sub-micron nails for on-chip phagocytosis

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Authors
Huys, Roeland; Bartic, Carmen; Van Meerbergen, Bart; Braeken, Dries; Loo, Josine; Winters, Kurt; Chen, Chang; Yitzchaik, S.; Spira, M.; Shappir, J.; Borghs, Gustaaf
Conference
Advanced Materials for Neuroprosthetic Interfaces
Title
Fabrication of CMOS compatible sub-micron nails for on-chip phagocytosis
Publication type
Proceedings paper
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