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Influence of pH on the channel cracking rate of organosilicate films in wet ambients

dc.contributor.authorIacopi, Francesca
dc.contributor.authorElia, Carmine
dc.contributor.authorFournier, Teddy
dc.contributor.authorSinapi, Fabrice
dc.contributor.authorHeylen, Nancy
dc.contributor.authorTravaly, Youssef
dc.date.accessioned2021-10-16T16:48:01Z
dc.date.available2021-10-16T16:48:01Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12327
dc.sourceIIOimport
dc.titleInfluence of pH on the channel cracking rate of organosilicate films in wet ambients
dc.typeOral presentation
dc.contributor.imecauthorHeylen, Nancy
dc.source.peerreviewno
dc.source.conferenceEuropean Congress and Exhibition on Advanced Materials and Processes - Euromat
dc.source.conferencedate10/09/2007
dc.source.conferencelocationNürnberg Germany
imec.availabilityPublished - imec


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