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Alternative catalysts for si-technology compatible growth of si nanowires

dc.contributor.authorIacopi, Francesca
dc.contributor.authorVereecken, Philippe
dc.contributor.authorSchaekers, Marc
dc.contributor.authorCaymax, Matty
dc.contributor.authorMoelans, Nele
dc.contributor.authorBlanpain, Bart
dc.contributor.authorDetavernier, C.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorGriffiths, Hefin
dc.date.accessioned2021-10-16T16:49:02Z
dc.date.available2021-10-16T16:49:02Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12331
dc.sourceIIOimport
dc.titleAlternative catalysts for si-technology compatible growth of si nanowires
dc.typeProceedings paper
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.source.peerreviewyes
dc.source.beginpageDD01-10
dc.source.conferenceLow-Dimensional Materials. Synthesis, Assembly, Property Scaling, and Modeling
dc.source.conferencedate9/04/2007
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Proceedings; Vol. 1017E


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