Influence of stress-induced leakage current on reliability of HfSiOx

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Authors

Jakschik, S.; Kauerauf, Thomas; Degraeve, Robin; Hwang, Young Nam; Duschl, R.; Kerber, M.; Avellan, A.; Kudelka, S.

Issue

2

Journal

IEEE Trans. Device and Materials Reliability

Volume

7

Title

Influence of stress-induced leakage current on reliability of HfSiOx

Publication type

Journal article

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