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AlxGa1-xN focal plane arrays for imaging applications in the extreme ultraviolet (EUV) wavelength range

dc.contributor.authorJohn, Joachim
dc.contributor.authorMalinowski, Pawel
dc.contributor.authorAparicio, Patricia
dc.contributor.authorHellings, Geert
dc.contributor.authorLorenz, Anne
dc.contributor.authorGermain, Marianne
dc.contributor.authorSemond, F.
dc.contributor.authorDuboz, J.-Y.
dc.contributor.authorBenmoussa, A.
dc.contributor.authorHochedez, J.-F.
dc.contributor.authorKroth, U.
dc.contributor.authorRichter, M.
dc.date.accessioned2021-10-16T16:57:45Z
dc.date.available2021-10-16T16:57:45Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12365
dc.sourceIIOimport
dc.titleAlxGa1-xN focal plane arrays for imaging applications in the extreme ultraviolet (EUV) wavelength range
dc.typeProceedings paper
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorMalinowski, Pawel
dc.contributor.imecauthorHellings, Geert
dc.contributor.orcidimecMalinowski, Pawel::0000-0002-2934-470X
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.source.peerreviewyes
dc.source.beginpage658505
dc.source.conferenceOptical Sensing Technology and Applications
dc.source.conferencedate16/05/2007
dc.source.conferencelocationVenice Italy
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 6585


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