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A novel method to determine the mechanical resonance frequency, quality factor and charging of electrostatically actuated micromechanical resonators

dc.contributor.authorKalicinski, Stanislaw
dc.date.accessioned2021-10-16T17:01:45Z
dc.date.available2021-10-16T17:01:45Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12380
dc.sourceIIOimport
dc.titleA novel method to determine the mechanical resonance frequency, quality factor and charging of electrostatically actuated micromechanical resonators
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceNanotimer Workshop on Micro- and Nano-Mechanical Resonators
dc.source.conferencedate3/12/2007
dc.source.conferencelocationCambridge UK
imec.availabilityPublished - imec


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