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A new method to determine the mechanical resonance frequency and charging in electrostatically actuated MEMS

dc.contributor.authorKalicinski, Stanislaw
dc.contributor.authorTilmans, Harrie
dc.contributor.authorWevers, Martine
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-16T17:02:00Z
dc.date.available2021-10-16T17:02:00Z
dc.date.issued2007-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12381
dc.sourceIIOimport
dc.titleA new method to determine the mechanical resonance frequency and charging in electrostatically actuated MEMS
dc.typeProceedings paper
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage329
dc.source.endpage332
dc.source.conference18th Workshop on Micromachining, Micromechanics and Microsystems
dc.source.conferencedate16/09/2007
dc.source.conferencelocationGuimaraes Portugal
imec.availabilityPublished - imec


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