dc.contributor.author | Kapila, Gautam | |
dc.contributor.author | Kaczer, Ben | |
dc.contributor.author | Nackaerts, Axel | |
dc.contributor.author | Collaert, Nadine | |
dc.contributor.author | Groeseneken, Guido | |
dc.date.accessioned | 2021-10-16T17:02:46Z | |
dc.date.available | 2021-10-16T17:02:46Z | |
dc.date.issued | 2007-03 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12384 | |
dc.source | IIOimport | |
dc.title | Direct measurement of top and sidewall interface trap density in SOI FinFETs | |
dc.type | Journal article | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.imecauthor | Collaert, Nadine | |
dc.contributor.imecauthor | Groeseneken, Guido | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
dc.source.peerreview | no | |
dc.source.beginpage | 232 | |
dc.source.endpage | 234 | |
dc.source.journal | IEEE Electron Device Letters | |
dc.source.issue | 3 | |
dc.source.volume | 28 | |
imec.availability | Published - imec | |