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Direct measurement of top and sidewall interface trap density in SOI FinFETs
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Authors
Kapila, Gautam
;
Kaczer, Ben
;
Nackaerts, Axel
;
Collaert, Nadine
;
Groeseneken, Guido
Issue
3
Journal
IEEE Electron Device Letters
Volume
28
Title
Direct measurement of top and sidewall interface trap density in SOI FinFETs
Publication type
Journal article
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