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Direct measurement of top and sidewall interface trap density in SOI FinFETs

Date

2007-03
Journal article
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dc.contributor.authorKapila, Gautam
dc.contributor.authorKaczer, Ben
dc.contributor.authorNackaerts, Axel
dc.contributor.authorCollaert, Nadine
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.accessioned2021-10-16T17:02:46Z
dc.date.available2021-10-16T17:02:46Z
dc.date.issued2007-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12384
dc.source.beginpage232
dc.source.endpage234
dc.source.issue3
dc.source.journalIEEE Electron Device Letters
dc.source.volume28
dc.title

Direct measurement of top and sidewall interface trap density in SOI FinFETs

dc.typeJournal article
dspace.entity.typePublication
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