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Effect of built-in stress level of piezoelectric AlN thin films on the properties of vibrational energy harvesters

dc.contributor.authorKarakaya, Koray
dc.contributor.authorRenaud, Michael
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorVullers, Ruud
dc.date.accessioned2021-10-16T17:03:01Z
dc.date.available2021-10-16T17:03:01Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12385
dc.sourceIIOimport
dc.titleEffect of built-in stress level of piezoelectric AlN thin films on the properties of vibrational energy harvesters
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage205
dc.source.endpage208
dc.source.conferencePowerMEMS. The 7th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
dc.source.conferencedate28/11/2007
dc.source.conferencelocationFreiburg Germany
imec.availabilityPublished - open access


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