dc.contributor.author | Kittl, Jorge | |
dc.contributor.author | Lauwers, Anne | |
dc.contributor.author | Pawlak, Malgorzata | |
dc.contributor.author | Veloso, Anabela | |
dc.contributor.author | Yu, HongYu | |
dc.contributor.author | Chang, Shou-Zen | |
dc.contributor.author | Hoffmann, Thomas Y. | |
dc.contributor.author | Pourtois, Geoffrey | |
dc.contributor.author | Brus, Stephan | |
dc.contributor.author | Demeurisse, Caroline | |
dc.contributor.author | Vrancken, Christa | |
dc.contributor.author | Absil, Philippe | |
dc.contributor.author | Biesemans, Serge | |
dc.date.accessioned | 2021-10-16T17:08:08Z | |
dc.date.available | 2021-10-16T17:08:08Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12404 | |
dc.source | IIOimport | |
dc.title | Modulation of the effective work function of fully-silicided (FUSI) gate stacks | |
dc.type | Journal article | |
dc.contributor.imecauthor | Lauwers, Anne | |
dc.contributor.imecauthor | Veloso, Anabela | |
dc.contributor.imecauthor | Pourtois, Geoffrey | |
dc.contributor.imecauthor | Brus, Stephan | |
dc.contributor.imecauthor | Demeurisse, Caroline | |
dc.contributor.imecauthor | Vrancken, Christa | |
dc.contributor.imecauthor | Absil, Philippe | |
dc.contributor.imecauthor | Biesemans, Serge | |
dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
dc.source.peerreview | no | |
dc.source.beginpage | 1857 | |
dc.source.endpage | 1860 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.issue | 9_10 | |
dc.source.volume | 84 | |
imec.availability | Published - imec | |
imec.internalnotes | Paper from INFOS 2007 | |