Publication:

Modulation of the effective work function of fully-silicided (FUSI) gate stacks

Date

2007

Journal article

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Author(s)

;

;

Pawlak, Malgorzata

;

Veloso, Anabela

;

;

Chang, Shou-Zen

;

Hoffmann, Thomas Y.

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Pourtois, Geoffrey

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;

Demeurisse, Caroline

;

Vrancken, Christa

;

Absil, Philippe

;

Biesemans, Serge

Journal

Microelectronic Engineering

Statistics

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