Modulation of the effective work function of fully-silicided (FUSI) gate stacks

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Author(s)

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Pawlak, Malgorzata

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Veloso, Anabela

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Chang, Shou-Zen

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Hoffmann, Thomas Y.

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Pourtois, Geoffrey

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Demeurisse, Caroline

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Vrancken, Christa

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Absil, Philippe

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Biesemans, Serge

Journal

Microelectronic Engineering

Metrics

1907 since deposited on 2021-10-16

Acq. date: 2025-10-24