Publication:

Modulation of the effective work function of fully-silicided (FUSI) gate stacks

Date

2007

Journal article

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Author(s)

;

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Pawlak, Malgorzata

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Veloso, Anabela

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Chang, Shou-Zen

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Hoffmann, Thomas Y.

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Pourtois, Geoffrey

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Demeurisse, Caroline

;

Vrancken, Christa

;

Absil, Philippe

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Biesemans, Serge

Journal

Microelectronic Engineering

Statistics

1909 since deposited on 2021-10-16

Acq. date: 2026-02-26