Publication:

Modulation of the effective work function of fully-silicided (FUSI) gate stacks

Date

2007
Journal article
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dc.contributor.authorKittl, Jorge
dc.contributor.authorLauwers, Anne
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorVeloso, Anabela
dc.contributor.authorYu, HongYu
dc.contributor.authorChang, Shou-Zen
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorBrus, Stephan
dc.contributor.authorDemeurisse, Caroline
dc.contributor.authorVrancken, Christa
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBiesemans, Serge
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorDemeurisse, Caroline
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.date.accessioned2021-10-16T17:08:08Z
dc.date.available2021-10-16T17:08:08Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12404
dc.source.beginpage1857
dc.source.endpage1860
dc.source.issue9_10
dc.source.journalMicroelectronic Engineering
dc.source.volume84
dc.title

Modulation of the effective work function of fully-silicided (FUSI) gate stacks

dc.typeJournal article
dspace.entity.typePublication
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