dc.contributor.author | Kittl, Jorge | |
dc.contributor.author | Pawlak, Malgorzata | |
dc.contributor.author | Torregiani, Cristina | |
dc.contributor.author | Lauwers, Anne | |
dc.contributor.author | Demeurisse, Caroline | |
dc.contributor.author | Vrancken, Christa | |
dc.contributor.author | Absil, Philippe | |
dc.contributor.author | Biesemans, Serge | |
dc.contributor.author | Detavernier, Christophe | |
dc.contributor.author | Jordan-Sweet, Jean | |
dc.contributor.author | Lavoie, Christian | |
dc.date.accessioned | 2021-10-16T17:09:04Z | |
dc.date.available | 2021-10-16T17:09:04Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12407 | |
dc.source | IIOimport | |
dc.title | Kinetics of Ni3Si2 formation in the Ni2Si-NiSi thin film reaction from in situ measurements | |
dc.type | Journal article | |
dc.contributor.imecauthor | Lauwers, Anne | |
dc.contributor.imecauthor | Demeurisse, Caroline | |
dc.contributor.imecauthor | Vrancken, Christa | |
dc.contributor.imecauthor | Absil, Philippe | |
dc.contributor.imecauthor | Biesemans, Serge | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 232102 | |
dc.source.journal | Applied Physics Letters | |
dc.source.issue | 23 | |
dc.source.volume | 91 | |
imec.availability | Published - imec | |