Kinetics of Ni3Si2 formation in the Ni2Si-NiSi thin film reaction from in situ measurements

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Authors

Kittl, Jorge; Pawlak, Malgorzata; Torregiani, Cristina; Lauwers, Anne; Demeurisse, Caroline; Vrancken, Christa; Absil, Philippe; Biesemans, Serge; Detavernier, Christophe; Jordan-Sweet, Jean; Lavoie, Christian

Issue

23

Journal

Applied Physics Letters

Volume

91

Title

Kinetics of Ni3Si2 formation in the Ni2Si-NiSi thin film reaction from in situ measurements

Publication type

Journal article

Embargo date

9999-12-31

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