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Metal bonding with ultra-thin layer for optical applications

dc.contributor.authorLauvernier, D.
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorDetavernier, C.
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-16T17:19:23Z
dc.date.available2021-10-16T17:19:23Z
dc.date.issued2007-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12446
dc.sourceIIOimport
dc.titleMetal bonding with ultra-thin layer for optical applications
dc.typeProceedings paper
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage79
dc.source.endpage82
dc.source.conferenceProceedings 12th Annual Symposium of the IEEE/LEOS Benelux Chapter
dc.source.conferencedate17/12/2007
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - open access


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