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Accurate and reliable optical CD of MuGFET down to 10nm

dc.contributor.authorLeray, Philippe
dc.contributor.authorLorusso, Gian
dc.contributor.authorCheng, Shaunee
dc.contributor.authorCollaert, Nadine
dc.contributor.authorJurczak, Gosia
dc.contributor.authorShirke, S.
dc.date.accessioned2021-10-16T17:25:20Z
dc.date.available2021-10-16T17:25:20Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12468
dc.sourceIIOimport
dc.titleAccurate and reliable optical CD of MuGFET down to 10nm
dc.typeProceedings paper
dc.contributor.imecauthorLeray, Philippe
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewno
dc.source.beginpage65183B
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XXI
dc.source.conferencedate27/02/2007
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec
imec.internalnotesSPIE Proceedings; Vol. 6518


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