Low temperature epitaxy and the importance of moisture control

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Authors
Leys, Frederik; Hikavyy, Andriy; Machkaoutsan, Vladimir; De Vos, Brecht; Geenen, Luc; Van Daele, Benny; Loo, Roger; Caymax, Matty
Conference
5th International Conferencce on Silicon Epitaxy and Heterostructures - ICSI-5
Title
Low temperature epitaxy and the importance of moisture control
Publication type
Oral presentation
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