On the interaction between inter-metal dielectric reliability and electromigration stress

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Authors
Li, Yunlong; Bruynseraede, Christophe; Groeseneken, Guido; Maex, Karen; Tokei, Zsolt
Conference
45th IEEE International Reliability Physics Symposium Proceedings - IRPS
Title
On the interaction between inter-metal dielectric reliability and electromigration stress
Publication type
Proceedings paper
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