dc.contributor.author | Li, Yunlong | |
dc.contributor.author | Ciofi, Ivan | |
dc.contributor.author | Carbonell, Laure | |
dc.contributor.author | Groeseneken, Guido | |
dc.contributor.author | Maex, Karen | |
dc.contributor.author | Tokei, Zsolt | |
dc.date.accessioned | 2021-10-16T17:28:06Z | |
dc.date.available | 2021-10-16T17:28:06Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12478 | |
dc.source | IIOimport | |
dc.title | Moisture related low-k dielectric reliability before and after thermal annealing | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Li, Yunlong | |
dc.contributor.imecauthor | Ciofi, Ivan | |
dc.contributor.imecauthor | Groeseneken, Guido | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.orcidimec | Li, Yunlong::0000-0003-4791-4013 | |
dc.contributor.orcidimec | Ciofi, Ivan::0000-0003-1374-4116 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 405 | |
dc.source.endpage | 409 | |
dc.source.conference | 45th IEEE International Reliability Physics Symposium Proceedings - IRPS | |
dc.source.conferencedate | 14/04/2007 | |
dc.source.conferencelocation | Phoenix, AZ USA | |
imec.availability | Published - imec | |