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Plasma ash modulation of TDDB thermal activation energy in damascene SiOC:H

dc.contributor.authorLi, Yunlong
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVan Aelst, Joke
dc.contributor.authorCarbonell, Laure
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T17:28:41Z
dc.date.available2021-10-16T17:28:41Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12480
dc.sourceIIOimport
dc.titlePlasma ash modulation of TDDB thermal activation energy in damascene SiOC:H
dc.typeJournal article
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVan Aelst, Joke
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewno
dc.source.beginpage320
dc.source.endpage325
dc.source.journalSemiconductor Science and Technology
dc.source.issue4
dc.source.volume22
imec.availabilityPublished - imec


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