Publication:
Plasma ash modulation of TDDB thermal activation energy in damascene SiOC:H
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1853 since deposited on 2021-10-16
2last month
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Acq. date: 2025-12-17
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Views
1853 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2025-12-17
Citations