Publication:

Plasma ash modulation of TDDB thermal activation energy in damascene SiOC:H

Date

2007
Journal article
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dc.contributor.authorLi, Yunlong
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVan Aelst, Joke
dc.contributor.authorCarbonell, Laure
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVan Aelst, Joke
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.date.accessioned2021-10-16T17:28:41Z
dc.date.available2021-10-16T17:28:41Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12480
dc.source.beginpage320
dc.source.endpage325
dc.source.issue4
dc.source.journalSemiconductor Science and Technology
dc.source.volume22
dc.title

Plasma ash modulation of TDDB thermal activation energy in damascene SiOC:H

dc.typeJournal article
dspace.entity.typePublication
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