Publication:

Plasma ash modulation of TDDB thermal activation energy in damascene SiOC:H

Date

2007

Journal article

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Author(s)

;

;

Van Aelst, Joke

;

Carbonell, Laure

;

Baklanov, Mikhaïl

;

Richard, Olivier

;

;

Groeseneken, Guido

;

Journal

Semiconductor Science and Technology

Statistics

1859 since deposited on 2021-10-16

Acq. date: 2026-10-13