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Stress and mechanical constants characterizations of phase-change SbTe-alloys: influence of the film thickness and substrate

dc.contributor.authorLisoni, Judit
dc.contributor.authorGille, Thomas
dc.contributor.authorGoux, Ludovic
dc.contributor.authorDelhougne, Romain
dc.contributor.authorAttenborough, Karen
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-16T17:34:04Z
dc.date.available2021-10-16T17:34:04Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12498
dc.sourceIIOimport
dc.titleStress and mechanical constants characterizations of phase-change SbTe-alloys: influence of the film thickness and substrate
dc.typeProceedings paper
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorDelhougne, Romain
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.source.peerreviewyes
dc.source.beginpageI12.6
dc.source.conferenceMaterials and Processes for Nonvolatile Memories II
dc.source.conferencedate9/04/2007
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proc.; Vol. 997


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