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Enhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structures

dc.contributor.authorLisoni, Judit
dc.contributor.authorJohnson, Jo
dc.contributor.authorGoux, Ludovic
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorMaes, David
dc.contributor.authorVander Meeren, Hans
dc.contributor.authorWillegems, Myriam
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorCaputa, C.
dc.contributor.authorZambrano, R.
dc.contributor.authorTurquat, Ch.
dc.contributor.authorMuller, Ch.
dc.date.accessioned2021-10-16T17:34:25Z
dc.date.available2021-10-16T17:34:25Z
dc.date.issued2007-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12499
dc.sourceIIOimport
dc.titleEnhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structures
dc.typeJournal article
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorWillegems, Myriam
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.source.peerreviewno
dc.source.beginpage14908
dc.source.journalJournal of Applied Physics
dc.source.issue1
dc.source.volume101
imec.availabilityPublished - imec


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