dc.contributor.author | Lisoni, Judit | |
dc.contributor.author | Johnson, Jo | |
dc.contributor.author | Goux, Ludovic | |
dc.contributor.author | Paraschiv, Vasile | |
dc.contributor.author | Maes, David | |
dc.contributor.author | Vander Meeren, Hans | |
dc.contributor.author | Willegems, Myriam | |
dc.contributor.author | Haspeslagh, Luc | |
dc.contributor.author | Wouters, Dirk | |
dc.contributor.author | Caputa, C. | |
dc.contributor.author | Zambrano, R. | |
dc.contributor.author | Turquat, Ch. | |
dc.contributor.author | Muller, Ch. | |
dc.date.accessioned | 2021-10-16T17:34:25Z | |
dc.date.available | 2021-10-16T17:34:25Z | |
dc.date.issued | 2007-01 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12499 | |
dc.source | IIOimport | |
dc.title | Enhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structures | |
dc.type | Journal article | |
dc.contributor.imecauthor | Goux, Ludovic | |
dc.contributor.imecauthor | Paraschiv, Vasile | |
dc.contributor.imecauthor | Willegems, Myriam | |
dc.contributor.imecauthor | Haspeslagh, Luc | |
dc.contributor.orcidimec | Goux, Ludovic::0000-0002-1276-2278 | |
dc.source.peerreview | no | |
dc.source.beginpage | 14908 | |
dc.source.journal | Journal of Applied Physics | |
dc.source.issue | 1 | |
dc.source.volume | 101 | |
imec.availability | Published - imec | |