Authors

Lisoni, Judit; Johnson, Jo; Goux, Ludovic; Paraschiv, Vasile; Maes, David; Vander Meeren, Hans; Willegems, Myriam; Haspeslagh, Luc; Wouters, Dirk; Caputa, C.; Zambrano, R.; Turquat, Ch.; Muller, Ch.

Issue

1

Journal

Journal of Applied Physics

Volume

101

Title

Enhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structures

Publication type

Journal article