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Enhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structures

Date

2007-01
Journal article
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dc.contributor.authorLisoni, Judit
dc.contributor.authorJohnson, Jo
dc.contributor.authorGoux, Ludovic
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorMaes, David
dc.contributor.authorVander Meeren, Hans
dc.contributor.authorWillegems, Myriam
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorCaputa, C.
dc.contributor.authorZambrano, R.
dc.contributor.authorTurquat, Ch.
dc.contributor.authorMuller, Ch.
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorWillegems, Myriam
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.date.accessioned2021-10-16T17:34:25Z
dc.date.available2021-10-16T17:34:25Z
dc.date.issued2007-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12499
dc.source.beginpage14908
dc.source.issue1
dc.source.journalJournal of Applied Physics
dc.source.volume101
dc.title

Enhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structures

dc.typeJournal article
dspace.entity.typePublication
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