Publication:
Enhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structures
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1930 since deposited on 2021-10-16
3last month
2last week
Acq. date: 2026-08-07
Citations
Statistics
Views
1930 since deposited on 2021-10-16
3last month
2last week
Acq. date: 2026-08-07
Citations