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Selective epitaxial Si/SiGe growth for VT shift adjustment in high k pMOS devices
Publication:
Selective epitaxial Si/SiGe growth for VT shift adjustment in high k pMOS devices
Date
2007
Journal article
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15035.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Loo, Roger
;
Sorada, Haruyuki
;
Inoue, Akira
;
Lee, B.C
;
Hyun, Sangjin
;
Jakschik, Stefan
;
Lujan, Guilherme
;
Hoffmann, Thomas Y.
;
Caymax, Matty
Journal
Semiconductor Science and Technology
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1875
since deposited on 2021-10-16
Acq. date: 2025-10-24
Citations
Metrics
Views
1875
since deposited on 2021-10-16
Acq. date: 2025-10-24
Citations