dc.contributor.author | Machkaoutsan, Vladimir | |
dc.contributor.author | Pagès, X. | |
dc.contributor.author | Bauer, M. | |
dc.contributor.author | Thomas, S. | |
dc.contributor.author | Mertens, Sofie | |
dc.contributor.author | Verheyden, K. | |
dc.contributor.author | Vanormelingen, Koen | |
dc.contributor.author | Granneman, E. | |
dc.date.accessioned | 2021-10-16T17:43:40Z | |
dc.date.available | 2021-10-16T17:43:40Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12531 | |
dc.source | IIOimport | |
dc.title | Thermal stability of Pt and C-doped NiSi films | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Machkaoutsan, Vladimir | |
dc.contributor.imecauthor | Mertens, Sofie | |
dc.contributor.orcidimec | Mertens, Sofie::0000-0002-1482-6730 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 145 | |
dc.source.endpage | 149 | |
dc.source.conference | 15th IEEE Conference on Advanced Thermal Processing of Semiconductors - RTP | |
dc.source.conferencedate | 2/10/2007 | |
dc.source.conferencelocation | Catania Italy | |
imec.availability | Published - open access | |