Show simple item record

Thermal stability of Pt and C-doped NiSi films

dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorPagès, X.
dc.contributor.authorBauer, M.
dc.contributor.authorThomas, S.
dc.contributor.authorMertens, Sofie
dc.contributor.authorVerheyden, K.
dc.contributor.authorVanormelingen, Koen
dc.contributor.authorGranneman, E.
dc.date.accessioned2021-10-16T17:43:40Z
dc.date.available2021-10-16T17:43:40Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12531
dc.sourceIIOimport
dc.titleThermal stability of Pt and C-doped NiSi films
dc.typeProceedings paper
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.imecauthorMertens, Sofie
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage145
dc.source.endpage149
dc.source.conference15th IEEE Conference on Advanced Thermal Processing of Semiconductors - RTP
dc.source.conferencedate2/10/2007
dc.source.conferencelocationCatania Italy
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
16265.pdf
Size:
1.062Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record