Publication:

Strained Si-on-insulator for advanced CMOS devices

Date

2007
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Author(s)

Mantl, S.
;
Buca, D.
;
Zhao, Q.T.
;
Hollander, B.
;
Feste, S.
;
Luysberg, M.
;
Reiche, M.
;
Gosele, U.
;
Buchholtz, W.
;
Wei, A.
;
Horstmann, M.
;
Loo, Roger  
;
Nguyen, Duy

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