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Improving conformality in selective dip-coating of patterned planar substrates

dc.contributor.authorMastrangeli, Massimo
dc.contributor.authorRuythooren, Wouter
dc.contributor.authorBaert, Kris
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorCelis, Jean-Pierre
dc.date.accessioned2021-10-16T17:54:22Z
dc.date.available2021-10-16T17:54:22Z
dc.date.issued2007-04
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12567
dc.sourceIIOimport
dc.titleImproving conformality in selective dip-coating of patterned planar substrates
dc.typeProceedings paper
dc.contributor.imecauthorRuythooren, Wouter
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewyes
dc.source.beginpage230
dc.source.endpage237
dc.source.conferenceFoundations of Nanoscience
dc.source.conferencedate18/04/2007
dc.source.conferencelocationSnowbird, UT USA
imec.availabilityPublished - imec


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